博士毕业于日本大阪大学,期间是JSPS特别研究员。其后,在华中科技大学机械科学与工程学院从事博士后研究,期间入选博士后国际交流引进项目。现就职于中山大学先进制造学院。研究以促进半导体晶圆产业化为导向,采用分子动力学仿真从原子尺度深刻研究理论基础,并以此为指导自主开发高效率的原子级抛光技术,工艺与装备。自主搭建的能场辅助抛光装备处于世界领先地位,已经被产业化应用。以第一作者在Int J Mech Sci、J Mater Process Technol、J Manuf Process等加工领域TOP期刊上发表论文10余篇,主持国家自然科学基金青年项目,授权/申请国家发明专利6项。
课题组依托中山大学先进制造学院,以黄含院长(昆士兰大学荣誉教授)为学术带头人,团队经费充足。诚挚邀请具有材料工程、机械工程、力学等专业背景的本科生、硕博研究生和博士后加入!
长期聚焦金刚石宽禁带半导体晶圆的能场辅助超精密抛光研究,形成了很好的理论基础,设备基础和非常具有创新性的研究思路,欢迎相关领域博士后加入一起高效率发表高水平论文。
基本信息
办公地址:广东省深圳市光明区公常路66号 中山大学理学园
2025.09 - 至今,中山大学,先进制造学院,副教授
2022.05 - 2025.08,华中科技大学,机械科学与工程学院,博士后
2021.04 - 2022.03:日本学术振兴会 (JSPS),青年研究员
2018.10 - 2022.03,日本大阪大学,精密科学与应用物理学,工学博士
研究领域
金刚石半导体晶圆的能场辅助原子级抛光
分子动力学与第一性原理仿真
半导体晶圆的激光改性加工
荣誉奖项
2022年:博士后国际交流引进项目
2021年:日本学术振兴学会(JSPS)特别研究员
2020年:日本马扎克财团(Mazak)颁发的杰出论文奖
科研项目
[1] 国家自然科学基金青年项目(52405477),2025.01-2027.12,主持
[2] 高性能材料特种零件制造技术教育部重点实验室2023年度开放课题,KFJJ-2023-02, 主持
[3] 日本学术振兴会(JSPS), 特別研究員奨励費, 21J11028, プラズマを援用した単結晶ダイヤモンド基板の高能率ダメージフリー研磨法の開発(基于等离子体辅助的单晶金刚石基板高效率无损伤抛光技术开发), 主持
[4] 国家自然科学基金面上项目(52375430),2024.01-2027.12,参与
[5] 国家自然科学基金面上项目(52575497),2026.01-2029.12,参与
期刊论文(全部都是金刚石加工相关)
1. Nian Liu, Hao Lu, Haoran Wang, Yongjie Zhang, Junfeng Xiao, Jianguo Zhang, Xiao Chen, Jianfeng Xu. Iron-catalyzed selective thermochemical etching achieves planarization of polycrystalline diamond, Applied Surface Science, 718 (2025) 164863.
2. Nian Liu, Haoran Wang, Ling Lei, Huilong Jiang, Yongjie Zhang, Junfeng Xiao, Jianguo Zhang, Xiao Chen, Jianfeng Xu*. Highly efficient medium vacuum UV-assisted polishing of diamond via C-C bond breakage stimulated graphitization, Tribology International, 209 (2025) 110702.
3. Nian Liu, Ling Lei, Hao Lu, Huilong Jiang, Yongjie Zhang, Junfeng Xiao, Jianguo Zhang, Xiao Chen, Jianfeng Xu. C-C bond rupture initiated graphitization achieves highly efficient diamond polishing, International Journal of Mechanical Sciences, 287 (2025) 109958.
4. Nian Liu, Ling Lei, Jingming Zhu, Hao Lu, Junfeng Xiao, Jianguo Zhang, Xiao Chen, Jianfeng Xu, Kazuya Yamamura, An interior damage free approach for nanosecond pulsed laser ablation of single crystal diamond via metal film induced self-maintaining graphitization, Journal of Manufacturing Processes, 131 (2024) 958-972.
5. Nian Liu, Ling Lei, Huilong Jiang, Yongjie Zhang, Junfeng Xiao, Jianguo Zhang, Xiao Chen, Jianfeng Xu, Kazuya Yamamura. A highly efficient semi-finishing approach for polycrystalline diamond film via plasma-based anisotropic etching, Journal of Materials Processing Technology, 332 (2024) 118578.
6. Nian Liu, Huilong Jiang, Junfeng Xiao, Jianguo Zhang, Xiao Chen, Jingming Zhu, Jianfeng Xu, Kazuya Yamamura, Insights into the atomic-scale removal mechanism of single crystal diamond in plasma-assisted polishing with quartz glass, Tribology International, 194 (2024) 109507.
7. Nian Liu, Kentaro Sugimoto, Naoya Yoshitaka, Hideaki Yamada, Rongyan Sun, Kenta Arima, Kazuya Yamamura. Highly efficient finishing of large-sized single crystal diamond substrates by combining nanosecond pulsed laser trimming and plasma-assisted polishing, Ceramics International, 49(11) (2023) 19109-19123.
8. Nian Liu, Kentaro Sugimoto, Naoya Yoshitaka, Hideaki Yamada, Rongyan Sun, Kentaro Kawai, Kenta Arima, Kazuya Yamamura. Effects of polishing pressure and sliding speed on the material removal mechanism of single crystal diamond in plasma-assisted polishing, Diamond and Related Materials, 124 (2022) 108899.
9. Nian Liu, Kohki Sugawara, Naoya Yoshitaka, Hideaki Yamada, Daisuke Takeuchi, Yuko Akabane, Kenichi Fujino, Kentaro Kawai, Kenta Arima, Kazuya Yamamura. Damage-free highly efficient plasma-assisted polishing of a 20-mm square large mosaic single crystal diamond substrate, Scientific Reports, 10(1) (2020) 1-7.
10. Nian Liu, Hideaki Yamada, Naoya Yoshitaka, Kentaro Sugimoto, Rongyan Sun, Kentaro Kawai, Kenta Arima, Kazuya Yamamura. Comparison of surface and subsurface damage of mosaic single-crystal diamond substrate processed by mechanical and plasma-assisted polishing, Diamond and Related Materials, 119 (2021) 108555.